Soft-x-ray projection lithography
نویسندگان
چکیده
Soft-x-ray projection imaging is demonstrated by the use of 14-nm radiation from a laser plasma source and a single-surface multilayer-coated ellipsoidal condenser. Aberrations in the condenser and the Schwarzschild imaging objective are characterized and correlated with imaging performance. A new Schwarzschild housing, designed for improved alignment stability, is described.
منابع مشابه
Possibilities for projection x-ray lithography using holographic optical elements.
The use of a single flat grazing incidence reflector on which a computer-generated hologram has been written is proposed for projection x-ray lithography.
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